The 4073B Ultra Advanced Parametric Tester enables semiconductor manufacturers to dramatically reduce test time for capacitance measurements and DC measurements in high-volume semiconductor wafer manufacturing processes. It offers up to 40 percent higher throughput than the 4073A or 4072A. The 4073B is a flexible test solution. It performs precise DC measurements, capacitance measurements, flash memory cell testing, and testing of other high-frequency applications.

General features

Supports up to 2xHPSMU, up to 2xHRSMU, and up to 8 total SMUs

Low-leakage switching matrix, customizable from 12 to 48 fully-guarded Kelvin outputs

High-frequency switching matrix with integrated pulse generator control

8 auxiliary inputs and 48 extended path inputs for support of external instruments

Measurement capabilities

2 microvolt and 1 femtoamp measurement resolution (HRSMU)

+/- 200 Volts and +/- 1 Amp output capability (HPSMU)

1 kHz to 2 MHz capacitance frequency measurement range (HSCMU)

+/- 1.6 Amp ground unit (GNDU)

HV-SPGU option measurement capabilities

+/-40 V output (80 V peak-to-peak) at high impedance

Pulse rise and fall times as fast as 20 ns

Three-level output pulse capability

Arbitrary Linear Waveform Generation (ALWG) function

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