The Keysight N9201A provides a parametric test solution for the yield ramp-up phase by allowing users to test more structures in less time and with greater throughput. With the new Keysight N9201A, Keysight’s 4070 and 4080 production parametric testers now offer a per-channel SMU (source/monitor unit) architecture that supports up to 40 total SMUs, five times more SMUs than previously available in a single tester, for extremely fast characterization of in-line array test structures. In addition to a per-channel SMU architecture, the N9201A features an address generation function, allowing engineers to do advanced array matrix testing.

Our new application note describes how you can improve the parametric test throughput with the Keysight N9201A

40 total SMUs, five times more SMUs than previously available in a single tester, provides extremely fast characterization of in-line array test structures

Fast, high throughput measurements for yield ramp-up phase, for either back-end of line (BEOL) testing or during in-line test

Tests larger amounts of test elements, such as resistor arrays and active matrix arrays, than was possible with previous solutions

Per-channel SMU architecture

Address generation function for advanced array matrix testing

Configurations available from 8 to 40 SMUs

General features

Option for 4070 Series and 4080 Series of parametric testers

Multi-channel SMU measurement capability

One pass platform on 4070/4080 Series

Concurrent TEG test/measurement

Measurement capabilities

Up to 40 SMU channels

5 picoamp and 100 microvolt measurement resolution

Address signal generation

SMU embedded program memory for concurrent measurement

Application for BEOL/Yield ramp Up

Good for BEOL TEG testing (Resistor,Vth,etc.)

Concurrent measurement resource for High/Low resolution TEG part

Improve existing 4070’s or 4080’s throughput drastically for BEOL TEG testing

Addressable array test structure test capability

Address Generation Function on Parametric Tester

SPC (Statistical Process Control) for DFM

Up to 32 bit parallel address signal generation

Up to 8 V/125 mA/50 kbps address signal generation

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