Meets the DC parametric, RF parametric, high frequency CV and pulsed IV measurement requirements necessitated by 65 nanometer (and below) technologies in a production test environment.

General Features

Covers from DC to RF

Supports S parameter measurement

Supports thin gate dielectric capacitance measurement (HFCV/RFCV)

Supports SOI and high-k dielectric measurement (Pulsed IV)

Measurement Capabilities

For dc measurement capabilities, see 4072A/B

Up to 20 GHz S parameter measurement range.

Up to 110 MHz HFCV and up to 8.5 GHz RFCV measurement

Pulsed IV as fast as 10 ns width.

HV-SPGU Option Measurement Capabilities

+/-40 V output (80 V peak-to-peak) at high impedance

Pulse rise and fall times as fast as 20 ns

Three-level output pulse capability

Arbitrary Linear Waveform Generation (ALWG) function

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